Macro Stress Mapping on Thin Film Buckling.

Goudeau, P. ; Villain, P. ; Renault, P. O. ; Tamura, N. ; Celestre, R. S. ; Padmore, H.

Technical Information Center Oak Ridge Tennessee

关键词: Thin films;    Buckling;    Delamination;    Gold;    Physical vapor deposition;   

RP-ID  :  DE2003807428

学科分类：工程和技术（综合）

美国|英语

来源: National Technical Reports Library

【 摘 要 】

Thin films deposited by Physical Vapor Deposition techniques on substrates generally exhibit large residual stresses which may be responsible of thin film buckling in the case of compressive stresses. Since the 80's, a lot of theoretical work has been done to develop mechanical models but only a few experimental work has been done on this subject to support these theoretical approaches and nothing concerning local stress measurement mainly because of the small dimension of the buckling (few 10th micrometers). This paper deals with the application of micro beam X-ray diffraction available on synchrotron radiation sources for stress mapping analysis of gold thin film buckling.