Development and approbation of nanoscalpels based probes for atomic force microscopy in the field of plasmonics

18th Russian Youth Conference on Physics of Semiconductors and Nanostructures, Opto- and Nanoelectronics

Zhukov, M.V.^1,2 ; Mukhin, I.S.^1,3 ; Golubok, A.O.^1,2

Department of Material Science and Nanotechnology, ITMO University, Kronverkskiy pr., 49, Saint-Petersburg

197101, Russia^1

Department of Scanning Probe Microscope and Spectroscopy, Institute of Analytical Instrumentation RAS, Ivan Chernykh, 31-33, Saint-Petersburg

198095, Russia^2

Laboratory of Renewable Energy Source, St Petersburg Academic University RAS, Khlopina, 8/3, Saint-Petersburg

194021, Russia^3

关键词: Gold substrates;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/816/1/012037/pdf
DOI  :  10.1088/1742-6596/816/1/012037

来源: IOP

【 摘 要 】

The formation and approbation of the specialized nanoscalpel (NS) probes were carried out. The possibility of producing diffraction gratings on gold substrates for plasmonics applications was shown. The optimal lithography parameters were revealed by using NS probes. It was shown that NS probes allow improving the lithography results such as the depth and width of the incisions as compared to standard probes.