Micro-system inertial sensing technology overview.

Allen, James Joe

Sandia National Laboratories

关键词: 99 General And Miscellaneous//Mathematics, Computing, And Information Science;    Sampling;    Resolution;    Capacitance;    Operation;   

DOI  :  10.2172/983678
RP-ID  :  SAND2009-3080
RP-ID  :  AC04-94AL85000
RP-ID  :  983678

美国|英语

来源: UNT Digital Library

【 摘 要 】

The purpose of this report is to provide an overview of Micro-System technology as it applies to inertial sensing. Transduction methods are reviewed with capacitance and piezoresistive being the most often used in COTS Micro-electro-mechanical system (MEMS) inertial sensors. Optical transduction is the most recent transduction method having significant impact on improving sensor resolution. A few other methods are motioned which are in a R&D status to hopefully allow MEMS inertial sensors to become viable as a navigation grade sensor. The accelerometer, gyroscope and gravity gradiometer are the type of inertial sensors which are reviewed in this report. Their method of operation and a sampling of COTS sensors and grade are reviewed as well.