MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report

DAGEL, DARYL J. ; ALLEN, JAMES J.

Sandia National Laboratories

关键词: 42 Engineering;    Miniaturization;    Design;    Degrees Of Freedom;    Residual Stresses;   

DOI  :  10.2172/808598
RP-ID  :  SAND2002-3954
RP-ID  :  AC04-94AL85000
RP-ID  :  808598

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来源: UNT Digital Library

【 摘 要 】

The primary goal of this portion of the LDRD is to develop a vertical programmable diffraction grating that can be fabricated with Sandia's Ultra-planar Multi-level MEMS Technology, the SUMMiT V{trademark} process. This grating is targeted for use in a chemical detection system dubbed the Polychromator. A secondary goal is to design diffraction grating structures with additional degrees of freedom (DOF). Gratings with 2.5 microns of vertical stroke have been realized. In addition, rotational DOF grating structures have been successfully actuated, and a structure has been developed that minimizes residual stress effects.