Self-Assembled Templates for Fabricating Novel Nano-Arrays and Controlling Materials Growth

Hwang, Robert Q. ; Ashley, Carol S. ; Brinker, C. Jeffrey ; Mitchell, Christine Charlotte ; Bartram, Michael Ewald ; Coltrin, Michael Elliott

Sandia National Laboratories

关键词: Miniaturization;    Process Control;    Microelectronic Circuits;    Materials;    42 Engineering;   

DOI  :  10.2172/794247
RP-ID  :  SAND2002-8076
RP-ID  :  AC04-94AL8500
RP-ID  :  794247

美国|英语

来源: UNT Digital Library

【 摘 要 】

No abstract prepared.