The fabrication of Stainless Stell Parts for MEMS

Garino, Terry J.

Sandia National Laboratories

关键词: Casting;    Cavities;    Molding;    Pyrolysis;    36 Materials Science;   

DOI  :  10.2172/793727
RP-ID  :  SAND2002-8075
RP-ID  :  AC04-94AL85000
RP-ID  :  793727

美国|英语

来源: UNT Digital Library

【 摘 要 】

A micro-molding process was used to fabricate parts in the 0.1 to 10 mm size range from a stainless steel nano-powder. The two types of molds used were both produced from parts fabricated using the LIGA process so that they had precise dimensional tolerance and straight sidewalls. Rigid PMMA molds were made by injection molding and flexible silicone rubber molds were made by casting. Mold filling was accomplished by mixing the powder with epoxy to form a putty-like material that was then pressed into the mold cavities and allowed to cure. After pyrolysis of the epoxy, the parts were sintered in forming gas. The densification kinetics were measured in situ using a video system. Full densification was achieved after 1 hour at 1350 C. The microstructure of the sintered parts was examined using the SEM. The hardness, dimensional tolerance and surface roughness of the sintered parts were also measured.