Metal-transfer-molding (MTM) technique for micromachined RF components

MEMS;Micromachining;RF;Wireless;Sensor;Molding;Polymer

Zhao, Yanzhu ; Electrical and Computer Engineering

University:Georgia Institute of Technology

Department:Electrical and Computer Engineering

关键词: MEMS;    Micromachining;    RF;    Wireless;    Sensor;    Molding;    Polymer;   

Others  :  https://smartech.gatech.edu/bitstream/1853/24750/1/Zhao_Yanzhu_200808_PhD.pdf

美国|英语

来源: SMARTech Repository

【 摘 要 】

This dissertation reports a metal-transfer-molding (MTM) technique for simultaneous implementation of air-lifted RF passive components, as well as coplanar waveguide (CPW) structures, in a high performance and potentially cost-effective fashion. A metal transfer mechanism is introduced into the conventional micro-molding process to realize polymer-core RF passive components and integration. A system-on-package (SOP) integration scheme of front-end RF components can be realized by this process. Several air-lifted RF components based on MTM technology have been presented with excellent performance. As an integration application of the MTM technology, a novel wireless passive airflow sensor based on the RF evanescent-mode cavity resonators has been also presented. The sensor makes use of RF technology to measure wind velocity through changes in the resonant frequency with applied airflow. Compared with reported wireless sensors based on conventional RF cavity resonator, this design has advantages such as compact size and greatly improved sensitivity. Wireless interrogating has also been demonstrated for the passive sensor. Overall, the RF components developed in this thesis illustrate the great potential of MTM technology in both wireless communication and sensor areas.