Post-Processed Integrated Microsystems

SHUL, RANDY J. ; KRAVITZ, STANLEY H. ; CHRISTENSON, TODD R. ; SCHUBERT, W. KENT ; CASALNUOVO, STEPHEN A. ; WESSENDORF, KURT O. ; ZIPPERIAN, THOMAS E.

Sandia National Laboratories

关键词: Microelectromechanical Systems (Mems);    Microsystems;    Monitors Microelectromechanical Systems (Mems);    Deep Reactive Ion Etching (Drie);    Miniaturization;   

DOI  :  10.2172/780289
RP-ID  :  SAND2001-0227
RP-ID  :  AC04-94AL85000
RP-ID  :  780289

美国|英语

来源: UNT Digital Library

【 摘 要 】

No abstract prepared.