Calibration of an interfacial force microscope for MEMS metrology : FY08-09 activities.

Houston, Jack E. ; Baker, Michael Sean ; Crowson, Douglas A. ; Mitchell, John Anthony ; Moore, Nathan W.

Sandia National Laboratories

关键词: Calibration;    Microelectronics;    42 Engineering;    Reliability;    Design;   

DOI  :  10.2172/1001011
RP-ID  :  SAND2009-6799
RP-ID  :  AC04-94AL85000
RP-ID  :  1001011

美国|英语

来源: UNT Digital Library

【 摘 要 】

Progress in MEMS fabrication has enabled a wide variety of force and displacement sensing devices to be constructed. One device under intense development at Sandia is a passive shock switch, described elsewhere (Mitchell 2008). A goal of all MEMS devices, including the shock switch, is to achieve a high degree of reliability. This, in turn, requires systematic methods for validating device performance during each iteration of design. Once a design is finalized, suitable tools are needed to provide quality assurance for manufactured devices. To ensure device performance, measurements on these devices must be traceable to NIST standards. In addition, accurate metrology of MEMS components is needed to validate mechanical models that are used to design devices to accelerate development and meet emerging needs. Progress towards a NIST-traceable calibration method is described for a next-generation, 2D Interfacial Force Microscope (IFM) for applications in MEMS metrology and qualification. Discussed are the results of screening several suitable calibration methods and the known sources of uncertainty in each method.