Preparation of free-standing multilayer hemispherical shell thin film using monodisperse polymer template

JOURNAL OF ALLOYS AND COMPOUNDS

卷:730

Article

Meenachisundaram, Sridevi^1,5  Kawaguchi, Takahiko²  Usami, Ryo²  Sakamoto, Naonori^2,3  Shinozaki, Kazuo⁴  Chellamuthu, Muthamizhchelvan⁵  Ponnusamy, Suruttaiya U.⁵  Suzuki, Hisao^1,2,3  Wakiya, Naoki^1,2,3 

[1] Shizuoka Univ, Grad Sch Sci & Technol, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan

[2] Shizuoka Univ, Dept Elect & Mat Sci, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan

[3] Shizuoka Univ, Res Inst Elect, Naka Ku, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan

[4] Tokyo Inst Technol, Sch Mat & Chem Technol, Meguro Ku, 2-22-1 O Okayama, Tokyo 1528550, Japan

[5] SRM Univ, Dept Phys & Nanotechnol, Kattankulathur 603203, Tamil Nadu, India

关键词: Free-standing thin film;    PZT thin film;    Polymer template;   

DOI  :  10.1016/j.jallcom.2017.09.290

来源: Elsevier

【 摘 要 】

A novel method to fabricate free-standing hemispherical shells of multilayer thin film is the demand of future technology to enhance the superlattices and multiferroic materials with one-dimensional quantum confinement. This is the first report to describe the fabrication of multilayer (LaNiO3 (LNO) (top electrode)/Pb(Zr, Ti)O-3 (PZT)/LNO (bottom electrode)) free-standing thin film with a close-packed hemispherical shell structure. The cross-sectional investigations of the single hemispherical shell reveal the hemispherical space inside the multilayer thin film which is indeed to alleviate the clamping force from the substrate and also it represents each layer in this film has uniform thickness though it is troublesome to achieve in the case of hemispherical shell structure is noteworthy. The fabricated device made up of a thin PZT film sandwiched between the two electrodes with hemispherical close-packed structure (CPS) is the most conceivable material that would open a new window of the wide variety of applications. (C) 2017 Elsevier B.V. All rights reserved.

【 授权许可】

Free