PZT thin film deposition techniques, properties and its application in ultrasonic MEMS sensors: a review

International Conference on Advances in Materials and Manufacturing Applications 2016

Shilpa, G.D.^1 ; Sreelakshmi, K.^1 ; Ananthaprasad, M.G.^2

Department of Telecommunication Engineering, R. V. College of Engineering, Bengaluru, India^1

Department of Mechanical Engineering, Dayanandasagar University, Bengaluru, India^2

关键词: Deposition technique;    Ferroelectric property;    Film surface morphology;    ITS applications;    Microelectromechanical system (MEMS);    PZT thin film;    PZT thin film deposition;    Ultrasonic mems;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/149/1/012190/pdf
DOI  :  10.1088/1757-899X/149/1/012190

来源: IOP

【 摘 要 】

This paper describes an overview of the state of art in PbZrxTi1-xO3(PZT)ferroelectric thin films and its applications in Micro Electro Mechanical Systems (MEMS). First, the deposition techniques and then the important properties of PZT films such as surface morphology polarization and ferroelectric properties are reviewed. Two major deposition techniques such as sol-gel and Magnetron sputtering are given and compared for the film surface morphology and ferroelectric properties. Finally, the application of PZT thin film in MEMS ultrasonic sensors is discussed.