Effect of mass diffusion on the damping ratio in micro-beam resonators

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES

卷:51

Article

Khanchehgardan, Ali¹  Rezazadeh, Ghader¹  Shabani, Rasool¹ 

[1] Urmia Univ, Dept Mech Engn, Orumiyeh, Iran

关键词: MEMS;    Resonator;    Internal damping;    Thermoelastic;    Mass diffusion;   

DOI  :  10.1016/j.ijsolstr.2014.05.009

来源: Elsevier

【 摘 要 】

Present investigation is focused on studying the effect of mass diffusion on the quality factor of the micro-beam resonators. Equation of motion is obtained using Hamilton's principle and also the equations of thermo-diffusive elastic damping are established using two dimensional non-Fourier heat conduction and non-Fickian mass diffusion models. Free vibration of a clamped-clamped micro-beam with isothermal boundary conditions at both ends, and also a cantilever micro-beam with adiabatic boundary condition assumption at the free end, is studied using Galerkin reduced order model formulation for the first mode of vibration. Mass diffusion effects on the damping ratio are studied for the various micro-beam thicknesses and temperatures and the obtained results are compared with the results of a model in which the mass diffusion effect is ignored. In addition to the classic critical thickness of thermoelastic damping, a new critical thickness concerning mass diffusion is introduced. (C) 2014 Elsevier Ltd. All rights reserved.

【 授权许可】

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