Low-temperature deposition of high-response piezoelectric thin films

SCRIPTA MATERIALIA

卷:63

Article

Sriram, S.¹ 

[1] RMIT Univ, Ctr Microelect & Mat Technol, Melbourne, Vic 3001, Australia

关键词: Thin films;    Electromechanical properties;    Crystalline oxides;    High-resolution electron microscopy;   

DOI  :  10.1016/j.scriptamat.2010.03.041

来源: Elsevier

【 摘 要 】

Strontium-doping of the popular lead zirconate titanate results in improved piezoelectric response characteristics. The synthesis of these thin films at a low temperature of 300 degrees C on silicon substrates is demonstrated. High response with an estimated piezoelectric coefficient (d(33)) value of 892 pm V(-1) was measured. Microstructural characterization results showing strong c-axis texture and lattice guiding effects are also presented. (C) 2010 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

【 授权许可】

Free