Development of microbeam technology to expand applications at TIARA

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:348

Article; Proceedings Paper

Kamiya, T.¹  Satoh, T.¹  Koka, M.¹  Kada, W.² 

[1] Japan Atom Energy Agcy, Takasaki Adv Radiat Res Inst, Tokai, Ibaraki, Japan

[2] Gunma Univ, Fac Sci & Technol, Maebashi, Gunma, Japan

关键词: Microbeam;    Ion beam analysis;    Proton beam writing;    Single ion hit;    Diamond membrane detector;   

DOI  :  10.1016/j.nimb.2014.12.047

来源: Elsevier

【 摘 要 】

Herein, we review the last half decade of progress in ion-microbeam technology and applications at the Takasaki Ion Accelerators for Advanced Radiation Applications facility. Materials were microanalysed with the light-ion-microbeam system by combining micro-particle-induced X-ray and gamma-ray emission, nuclear-reaction analysis and micro-ion-beam-induced luminescence to analyse elements, including light elements such as lithium, boron or fluoride, and also their chemical states. For microfabrication, we used particle-beam writing and techniques of maskless patterning to processes materials without etching. The goal was to develop optical, magnetic or other new types of microdevices with both light-ion and the heavy-ion microbeam systems. In addition, techniques were developed to monitor in real time every individual ion injection by using an efficient scintillator or a thin diamond particle detector in both heavy-ion and high-energy heavy-ion microbeam systems. (C) 2014 Elsevier B.V. All rights reserved.

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