International Journal of Physical Sciences | |
Analysis of electrostatically actuated microbeams using dimensionless groups | |
Mohammad Mahdi Jalili1  | |
关键词: Microbeam; squeeze film damping; dynamic model; dimensionless groups.; | |
DOI : 10.5897/IJPS11.905 | |
学科分类:物理(综合) | |
来源: Academic Journals | |
【 摘 要 】
The vibrational behavior of coupled-domain micro electro mechanical systems (MEMS) devices with electrostatic actuation and squeeze film effect is investigated in this article. π-Buckingham theory is used to extract dimensionless parameters for this problem. Using these parameters, non-dimensional equation of Euler-Bernoulli beam theory and Reynolds equation of squeeze film damping are developed. Finite difference method is applied to solve these dimensionless equations simultaneously. After validation of presented non-dimensional model through comparison with literature, pull-in voltage is calculated for different conditions of microbeam. In addition, stability of the system is investigated for different non-dimensional voltage. The results will be useful in designing coupled-domain microbeams.
【 授权许可】
CC BY
【 预 览 】
Files | Size | Format | View |
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RO201902017918488ZK.pdf | 484KB | download |