Analysis of electrostatically actuated microbeams using dimensionless groups

International Journal of Physical Sciences

Mohammad Mahdi Jalili¹ 

关键词: Microbeam;    squeeze film damping;    dynamic model;    dimensionless groups.;   

DOI  :  10.5897/IJPS11.905

学科分类：物理（综合）

来源: Academic Journals

【 摘 要 】

The vibrational behavior of coupled-domain micro electro mechanical systems (MEMS) devices with electrostatic actuation and squeeze film effect is investigated in this article. π-Buckingham theory is used to extract dimensionless parameters for this problem. Using these parameters, non-dimensional equation of Euler-Bernoulli beam theory and Reynolds equation of squeeze film damping are developed. Finite difference method is applied to solve these dimensionless equations simultaneously. After validation of presented non-dimensional model through comparison with literature, pull-in voltage is calculated for different conditions of microbeam. In addition, stability of the system is investigated for different non-dimensional voltage. The results will be useful in designing coupled-domain microbeams.

【 授权许可】

CC BY