Rutherford backscattering analysis of porous thin TiO2 films

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:273

Article; Proceedings Paper

Mayer, M.¹  von Toussaint, U.¹  Dewalque, J.²  Dubreuil, O.²  Henrist, C.²  Cloots, R.²  Mathis, F.³ 

[1] EURATOM, Max Planck Inst Plasmaphys, D-85748 Garching, Germany

[2] Univ Liege, Dept Chem, GreenMat LCIS, B-4000 Liege, Belgium

[3] Univ Liege, FNRS, Ctr Europeen Archeometrie, IPNAS, B-4000 Liege, Belgium

关键词: Computer software;    Data analysis;    Simulation;    Ion beam analysis;    Porous materials;   

DOI  :  10.1016/j.nimb.2011.07.045

来源: Elsevier

【 摘 要 】

The additional energy spread due to sample porosity was implemented in the SIMNRA simulation code, version 6.60 and higher. Deviations of the path length and energy loss distributions from the ones expected from a Poisson distribution of the number of traversed pores are taken into account. These deviations are due to the interaction of pores at higher pore concentrations by overlap or blocking. The skewnesses of the energy distributions are approximated by two-piece normal distributions with identical first three moments. Propagation of porosity-induced energy spread in thick layers is taken into account. Calculated results are compared to experimental data obtained with thin TiO2 mesoporous films measured by Rutherford backscattering (RBS), transmission electron microscopy (TEM), and atmospheric poroellipsometry. (C) 2011 Elsevier B.V. All rights reserved.

【 授权许可】

Free