Computer simulation of ion beam analysis of laterally inhomogeneous materials

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:371

Article; Proceedings Paper

Mayer, M.¹ 

[1] Max Planck Inst Plasma Phys, Boltzmannstr 2, D-85748 Garching, Germany

关键词: Computer simulation;    Ion beam analysis;    Materials analysis;    Charged particle energy spectra;    SIMNRA;   

DOI  :  10.1016/j.nimb.2015.11.032

来源: Elsevier

【 摘 要 】

The program STRUCTNRA for the simulation of ion beam analysis charged particle spectra from arbitrary two-dimensional distributions of materials is described. The code is validated by comparison to experimental backscattering data from a silicon grating on tantalum at different orientations and incident angles. Simulated spectra for several types of rough thin layers and a chessboard-like arrangement of materials as example for a multi-phase agglomerate material are presented. Ambiguities between back-scattering spectra from two-dimensional and one-dimensional sample structures are discussed. (C) 2015 Elsevier B.V. All rights reserved.

【 授权许可】

Free