Improved physics in SIMNRA 7

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:332

Article; Proceedings Paper

Mayer, M.

关键词: Computer simulation;    Ion beam analysis;    SIMNRA;    Rutherford backscattering;    Nuclear reaction analysis;   

DOI  :  10.1016/j.nimb.2014.02.056

来源: Elsevier

【 摘 要 】

SIMNRA is an analytical code for the simulation of ion beam analysis energy spectra obtained by Rutherford backscattering, non-Rutherford scattering, elastic recoil detection analysis, and nuclear reaction analysis. Improvements of the simulation physics in SIMNRA version 7 include among others the skewness of all energy spread distributions, improved handling of scattering or reaction cross-sections with structure, generalized layer roughness, and sample porosity. (C) 2014 Elsevier B.V. All rights reserved.

【 授权许可】

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