Fluence dependent changes of surface morphology and sputtering yield of iron: Comparison of experiments with SDTrimSP-2D

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

卷:430

Article; Proceedings Paper

Stadlmayr, R.¹  Szabo, P. S.¹  Berger, B. M.¹  Cupak, C.¹  Chiba, R.^1,5  Bloech, D.¹  Mayer, D.¹  Stechauner, B.¹  Sauer, M.²  Foelske-Schmitz, A.²  Oberkofler, M.³  Schwarz-Selinger, T.³  Mutzke, A.⁴  Aumayr, F.¹ 

[1] TU Wien, Inst Appl Phys, Fus OAW, Wiedner Hauptstr 8-10, A-1040 Vienna, Austria

[2] TU Wien, Analyt Instrumentat Ctr, Getreidemarkt 9, A-1060 Vienna, Austria

[3] Max Planck Inst Plasma Phys, Bolzmannstr 2, D-85748 Garching, Germany

[4] Max Planck Inst Plasma Phys, Wendelsteinstr 1, D-17491 Greifswald, Germany

[5] Tokyo Inst Technol, Meguro Ku, Tokyo 1528550, Japan

关键词: Sputtering;    Erosion;    Quartz-crystal-microbalance;    Surface roughness;    Trim;   

DOI  :  10.1016/j.nimb.2018.06.004

来源: Elsevier

【 摘 要 】

The influence of surface morphology modifications on the sputtering yield of thin Fe films by monoenergetic Ar ions is studied by using a highly sensitive quartz crystal microbalance (QCM) technique. The morphology changes are induced by prolonged sputtering up to a total Ar fluence of 8 x 10(21) m(-2). Atomic force microscopy (AFM) measurements are performed to analyse the sample topography before and after irradiation and to determine surface roughness parameters. Numerical modelling with the codes SDTrimSP and SDTrimSP-2D are performed for comparison. Our investigations show that by using the local distribution of projectile impact angles, as derived from AFM measurements, as well as the elemental composition of the samples as an input to the codes SDTrimSP and SDTrimSP-2D the agreement between experiment and simulations is substantially improved.

【 授权许可】

Free