Surface characterization of poly(methylmethacrylate) based nanocomposite thin films containing Al2O3 and TiO2 nanoparticles

THIN SOLID FILMS

卷:518

Article

Lewis, S.¹  Haynes, V.¹  Wheeler-Jones, R.²  Sly, J.³  Perks, R. M.²  Piccirillo, L.¹ 

[1] Univ Manchester, Sch Phys & Astron, Radio Astron Technol Grp, Manchester M13 9PL, Lancs, England

[2] Cardiff Sch Engn, Inst Adv Mat & Energy Syst, Cardiff CF24 3AA, S Glam, Wales

[3] Univ Manchester, Sch Elect & Elect Engn, Microelect & Nanostruct Grp, Manchester M60 1QD, Lancs, England

关键词: Poly(MethylMethAcrylate);    Aluminum oxide;    Titanium oxide;    Nanoparticles;    Nanocomposites;    Atomic force microscopy;    Electron beam resist;   

DOI  :  10.1016/j.tsf.2009.09.005

来源: Elsevier

【 摘 要 】

Poly(methylmethacrylate) (PMMA) based nanocomposite electron beam resists have been demonstrated by spin coating techniques. When TiO2 and Al2O3 nanoparticles were directly dispersed into the PMMA polymer matrix, the resulting nanocomposites produced poor quality films with surface roughnesses of 322 and 402 nm respectively. To improve the surface of the resists, the oxide nanoparticles were encapsulated in toluene and methanol. Using the zeta potential parameter, it was found that the stabilities of the toluene/oxide nanoparticle suspensions were 7.7 mV and 19.4 mV respectively, meaning that the suspension was not stable. However, when the TiO2 and Al2O3 nanoparticles were encapsulated in methanol the zeta potential parameter was 31.9 mV and 39.2 mV respectively. Therefore, the nanoparticle suspension was stable. This method improved the surface roughness of PMMA based nanocomposite thin films by a factor of 6.6 and 6.4, when TiO2 and Al2O3 were suspended in methanol before being dispersed into the PMMA polymer. (C) 2009 Elsevier B.V. All rights reserved.

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