In situ X-ray diffraction studies on the piezoelectric response of PZT thin films

THIN SOLID FILMS

卷:603

Article

Davydok, A.^1,2  Cornelius, T. W.¹  Mocuta, C.³  Lima, E. C.⁴  Araujo, E. B.⁵  Thomas, O.¹ 

[1] Univ Toulon & Var, Aix Marseille Univ, CNRS, IM2NP UMR 7334, F-13397 Marseille, France

[2] Max Planck Inst Eisenforsch GmbH, Dept Struct & Nanomicromech Mat, D-40237 Dusseldorf, Germany

[3] SOLEIL Synchrotron, DiffAbs Beamline Orme Merisiers, St Aubin BP 48, Y-91192 Gif Sur Yvette, France

[4] Univ Fed Tocantins, BR-77500000 Porto Nacl, TO, Brazil

[5] Univ Estadual Paulista, Dept Quim & Fis, Av Brasil,56 Ctr, BR-15385000 Ilha Solteira, SP, Brazil

关键词: Piezoeffect;    X-ray diffraction;    Thin film;    Anisotropy;    In-situ experiment;   

DOI  :  10.1016/j.tsf.2016.01.045

来源: Elsevier

【 摘 要 】

Piezoelectric properties of randomly oriented self-polarized PbZr0.50Ti0.50O3 (PZT) thin films were investigated using in situ synchrotron X-ray diffraction. Possibilities for investigating the piezoelectric effect using microsized hard X-ray beams are demonstrated and perspectives for future dynamical measurements on PZT samples with variety of compositions and thicknesses are given. Studies performed on the crystalline [100, 110] directions evidenced piezoelectric anisotropy. The piezoelectric coefficient d(33) was calculated in terms of the lab reference frame (d(perp)) and found to be two times larger along the [100] direction than along the [110] direction. The absolute values for the d(perp) amount to 120 and 230 pm/V being in good agreement with experimental and theoretical values found in literature for bulk PZT ceramics. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

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