M-line spectroscopic, spectroscopic ellipsometric and microscopic measurements of optical waveguides fabricated by MeV-energy N+ ion irradiation for telecom applications

THIN SOLID FILMS

卷:541

Article; Proceedings Paper

Banyasz, I.¹  Berneschi, S.^2,3  Fried, M.⁴  Lohner, T.⁴  Conti, G. Nunzi³  Righini, G. C.³  Pelli, S.³  Zolnai, Z.⁴ 

[1] Hungarian Acad Sci, Wigner Res Ctr Phys, POB 49, H-1525 Budapest, Hungary

[2] Enrico Fermi Ctr Study & Res, I-00184 Rome, Italy

[3] IFAC CNR, Nello Carrara Inst Appl Phys, MDF Lab, I-50019 Sesto Fiorentino, FI, Italy

[4] Hungarian Acad Sci, Res Ctr Nat Sci, Inst Tech Phys & Mat Sci, H-1525 Budapest, Hungary

关键词: Optical waveguide;    Ion beam irradiation;    M-line spectroscopy;    Spectroscopic ellipsometry;    Er-doped tungsten-tellurite glass;    Bismuth germanate;    Interference phase contrast microscopy;   

DOI  :  10.1016/j.tsf.2012.11.134

来源: Elsevier

【 摘 要 】

Irradiation with N+ ions of the 1.5-3.5 MeV energy range was applied to optical waveguide formation. Planar and channel waveguides have been fabricated in an Er-doped tungsten-tellurite glass, and in both types of bismuth germanate (KO) crystals: Bi4Ge3O12 (eulytine) and Bi12GeO20 (sillenite). Multi-wavelength m-line spectroscopy and spectroscopic ellipsometry were used for the characterisation of the ion beam irradiated waveguides. Planar waveguides fabricated in the Er-doped tungsten-tellurite glass using irradiation with N+ ions at 3.5 MeV worked even at the 1550 nm telecommunication wavelength. 3.5 MeV N+ ion irradiated planar waveguides in eulytine-type BGO worked up to 1550 nm and those in sillenite-type BGO worked up to 1330 nm. (C) 2012 Elsevier B.V. All rights reserved.

【 授权许可】

Free