Raman study of light-emitting SiNx films grown on Si by low-pressure chemical vapor deposition

THIN SOLID FILMS

卷:579

Article

Komarov, F.¹  Vlasukova, L.²  Parkhomenko, I.²  Milchanin, O.¹  Mudryi, A.³  Togambaeva, A.⁴  Korolik, O.² 

[1] AN Sevchenko Appl Phys Problems Res Inst, Minsk 220045, BELARUS

[2] Belarusian State Univ, Minsk 220030, BELARUS

[3] Natl Acad Sci Belarus, Sci & Pract Mat Res Ctr, Minsk 220072, BELARUS

[4] Al Farabi Kazakh Natl Univ, Alma Ata 050038, Kazakhstan

关键词: Si-rich silicon nitride;    Low pressure chemical vapor deposition;    Annealing;    Raman scattering;    Photoluminescence;    Si nanoclusters;    N-centers;    K-centers;   

DOI  :  10.1016/j.tsf.2015.03.003

来源: Elsevier

【 摘 要 】

Si-rich silicon nitride (SRSN) films were deposited on Si wafers by low pressure chemical vapor deposition (LPCVD) technique and, subsequently, annealed at (800-1200) degrees C to form Si precipitates. The composition of SiNx films was measured by Rutherford backscattering spectrometry (RBS). Two sets of samples differed by the amount of excessive Si (Si-exc) in silicon nitride were studied. Evolution of Si nanoclusters from amorphous to crystalline ones during high temperature treatment was examined by Raman scattering (RS) spectroscopy. The amorphous Si clusters were already revealed in as-deposited SiNx while the annealing results in their crystallization. The crystalline nanoprecipitates are only registered in nitride films after annealing at 1200 degrees C. A dependence of Raman scattering intensity from the Si wafer on the temperature of annealing of SiNx/Si structures was revealed. This information was used to explain the phase transformations in SRSNs during high temperature treatments. The peculiarities of photoluminescence (PL) spectra for two sets of Si-rich SiNx films are explained taking into account the contribution from the quantum confinement effect of Si nanocrystals and from the native defects in silicon nitride matrix, such as N-and K-centers. (C) 2015 Elsevier B.V. All rights reserved.

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