Effects of thermal treatment on structure, surface microstructure and optical properties of nitrogen-ion irradiated nanoparticle thin films

SURFACE & COATINGS TECHNOLOGY

卷:306

Article; Proceedings Paper

Wang, Xue-Lin^1,2 

[1] Shandong Univ, State Key Lab Crystal Mat, Sch Phys, Jinan 250100, Peoples R China

[2] Shandong Univ, Key Lab Particle Phys & Particle Irradiat MOE, Jinan 250100, Peoples R China

关键词: Rf-magnetron sputtering;    Ion irradiation;    X-ray diffraction;    Transmittance;   

DOI  :  10.1016/j.surfcoat.2016.05.014

来源: Elsevier

【 摘 要 】

In this paper, we studied the effects of ion irradiation and annealing treatment on the ZnO thin films. ZnO thin films were first prepared on sapphire substrate by rf-magnetron sputtering technique, followed by nitrogen ion irradiation and annealing treatment. The crystallographic properties, surface morphology and optical properties changed after nitrogen ion irradiation and annealing treatment, which were investigated by X-ray diffraction, scanning electron microscopy and absorption spectroscopy. (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

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