SU-8 micro coriolis mass flow sensor

SENSORS AND ACTUATORS B-CHEMICAL

卷:241

Article

Monge, Rosa^1,2,3  Groenesteijn, Jarno⁴  Alveringh, Dennis⁴  Wiegerink, R. J.⁴  Notters, Joost⁴  Fernandez, Luis J.^1,2,3 

[1] CIBER BBN, Grp Struct Mech & Mat Modelling GEMM, Zaragoza, Spain

[2] Univ Zaragoza, Aragon Inst Engn Res I3A, Zaragoza, Spain

[3] Inst Salud Carlos III, Aragon Inst Biomed Res, Madrid, Spain

[4] Univ Twente, MESA Inst Nanotechnol, Enschede, Netherlands

关键词: Flow sensor;    Coriolis;    Microfluidics;    SU-8;    MEMS;   

DOI  :  10.1016/j.snb.2016.10.133

来源: Elsevier

【 摘 要 】

This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 mu m x 100 mu m and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0-800 mg/min in the case of water and 0-650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0-800 mu l/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA). (C) 2016 Elsevier B.V. All rights reserved.

【 授权许可】

Free