Bacteria electrical detection using 3D silicon nanowires based resistor

SENSORS AND ACTUATORS B-CHEMICAL

卷:273

Article

Le Borgne, Brice¹  Pichon, Laurent¹  Salaun, Anne Claire¹  Le Bihan, Baptiste¹  Jolivet-Gougeon, Anne²  Martin, Sophie³  Rogel, Regis¹  de Sagazan, Olivier¹ 

[1] Univ Rennes 1, IETR, UMR CNRS 6164, Rennes, France

[2] Univ Rennes 1, Nutr Metab & Canc, NuMeCan UMR INSERM 1241, Rennes, France

[3] Soc ARCLYNN, Missillac, France

关键词: Silicon nanowires;    Resistor;    Bacteria detection;   

DOI  :  10.1016/j.snb.2018.07.101

来源: Elsevier

【 摘 要 】

Resistors based on silicon nanowires (SiNWs) are developed for the direct detection of Escherichia coil bacteria. The devices are manufactured using conventional silicon technology. The SiNWs are synthesized by the vapor liquid solid process (VLS) using gold as the catalyst. The electrodes of the device consist of highly in situ doped polycrystalline silicon. The results show that the corresponding resistances can be potentially used for the detection of bacteria by electrical measurements, using SiNWs as sensitive units. The bacteria are preferentially hooked in the SiNWs network, which causes a drastic reduction in the electrical resistance of the component. Such resistor manufactured in a simple and low-cost CMOS (Complementary Metal Oxide Semiconductor) technology acts as proof of concept. This device offers promising potentialities taking advantages of integration into CMOS platform for alternative direct electrical detection of bacteria to monitor the contamination in environment for hygiene applications.

【 授权许可】

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