A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

Micromachines

Wenhao Li¹  Yangyang Liu¹  Suwei Wang¹  Jiashun Li¹  Pinggang Jia¹  Jun Wang¹ 

[1] State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China;

关键词: high temperature;    pressure sensor;    fiber-optic Fabry–Perot;    high fineness;   

DOI  :  10.3390/mi13050763

来源: DOAJ

【 摘 要 】

In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/°C at 25~300 °C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing.

【 授权许可】

Unknown