Design and Fabrication of a MEMS Pressure Sensor and Developing a Release Protocol for MEMS

mems;release;pressure sensor;stiction

Bhate, Kaustubh Ramesh ; Dr. Paul D. Franzon, Committee Chair,Dr. Christine S. Grant, Committee Co-Chair,Dr. Griff Bilbro, Committee Member,Bhate, Kaustubh Ramesh ; Dr. Paul D. Franzon ; Committee Chair ; Dr. Christine S. Grant ; Committee Co-Chair ; Dr. Griff Bilbro ; Committee Member

University:North Carolina State University

关键词: mems;    release;    pressure sensor;    stiction;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/1323/etd.pdf?sequence=1&isAllowed=y

美国|英语

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【 摘 要 】

This presents the design and fabrication of a MEMS Pressure Sensor for application in the Textile Industry. The transducer element in the sensor is a piezoresistive device. The Pressure Sensor layout is made in Cadence-Virtuoso and a 3-D Model is simulated in MEMCAD. Calculated and simulated results are compared. Processing steps are carried out in the NCSU Cleanroom to fabricate the device. A part of this thesis also attempts to develop a Release Protocol for MEMS devices made in the SUMMIT process. SUMMIT chips are released by wet etching in HF followed by rinsing in Methanol. The released device is then observed under Optical Microscope for results. Cantilever beams are also designed in SUMMIT process to be tested electrically when they come back after being fabricated at Sandia National Laboratories.