A Passive Pressure Sensor Fabricated by Post-Fire Metallization on Zirconia Ceramic for High-Temperature Applications

Micromachines

Tao Luo¹  Qiulin Tan¹  Liqiong Ding¹  Tanyong Wei²  Chao Li²  Chenyang Xue¹  Jijun Xiong¹ 

[1] Key Laboratory of Instrumentation Science and Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China; E-Mails:;Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China; E-Mails:

关键词: pressure sensor;    high temperature;    post-fire metallization;    zirconia ceramic;    LC resonance;   

DOI  :  10.3390/mi5040814

来源: mdpi

【 摘 要 】

A high-temperature pressure sensor realized by the post-fire metallization on zirconia ceramic is presented. The pressure signal can be read out wirelessly through the magnetic coupling between the reader antenna and the sensor due to that the sensor is equivalent to an inductive-capacitive (LC) resonance circuit which has a pressure-sensitive resonance frequency. Considering the excellent mechanical properties in high-temperature environment, multilayered zirconia ceramic tapes were used to fabricate the pressure-sensitive structure. Owing to its low resistivity, sliver paste was chosen to form the electrical circuit via post-fire metallization, thereby enhancing the quality factor compared to sensors fabricated by cofiring with a high-melting-point metal such as platinum, tungsten or manganese. The design, fabrication, and experiments are demonstrated and discussed in detail. Experimental results showed that the sensor can operate at 600 °C with quite good coupling. Furthermore, the average sensitivity is as high as 790 kHz/bar within the measurement range between 0 and 1 Bar.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.