A Critical Review of MEMS Capacitive Pressure Sensors

Sensors & Transducers

Kirankumar B. BALAVALAD¹  B. G. SHEEPARAMATTI¹ 

[1] Department of Electronics & Communication Engineering, Basaveshwar Engineering College, Bagalkot-587103, Karnataka, India;

关键词: MEMS;    Pressure Sensors;    Capacitive Pressure Sensors;    COMSOL Multiphysics.;   

DOI  :  

来源: DOAJ

【 摘 要 】

This paper provides an overview including developments, challenges with respect to design, modelling, simulation and analysis of MEMS pressure sensors. Recently MEMS capacitive pressure sensors have gained advantages over piezoresistive pressure sensor due to high sensitivity, low power consumption, invariance of temperature effects. As theses sensors application range is increasing, it is essential to review the technological developments and future scope of MEMS capacitive pressure sensor. This paper focuses on the review of various types of capacitive pressure sensor principles, design, modelling, parameters to consider, materials that can be used in fabrication. Few models of capacitive pressure sensors have been simulated and the results are presented. Simulation results show how the capacitance varies with increase pressure (harsh environment). The design, modelling and simulation of pressure sensors have been done using Comsol/Multphysics.

【 授权许可】

Unknown