Development of a single-stage nano indenter

MEMS stage, Comb drive

Charles Fernandes, Allen Gabriel ; Ferreira ; Placid M.

关键词: MEMS stage, Comb drive;   

Others  :  https://www.ideals.illinois.edu/bitstream/handle/2142/101088/CHARLESFERNANDES-THESIS-2018.pdf?sequence=1&isAllowed=y

美国|英语

来源: The Illinois Digital Environment for Access to Learning and Scholarship

【 摘 要 】

The current work seeks to understand the functionality of a single degree-of-freedom stage in a MEMS (Micro-Electromechanical system) platform that enables very precise displacement as well as force control. This type of stage finds use in determining fluid properties such as viscosity; to determine the strength and rigidity of carbon nanotubes (CNTs) and monolayers of graphene and for mechano-transduction in cellular mechanics and extracellular matrix. The current design is shown to produce a displacement of 39 μm and is capable of applying a theoretical maximum force of 260 μN. The study explores in detail the testing and analysis of the device without delving into great detail about the initial design and fabrication of the device itself. Much work was done to properly interface this MEMS device to the external world using connectors and a signal processing circuit in a custom-built PCB for improved noise reduction and enhanced signal strength. A capacitance-to-digital converter (CDC) IC, AD7747 is used for reading the capacitance signals from the MEMS device. The AD7747 uses I2C communication protocol and Arduino ATmega 2560 was used to read the data generated by the IC. Moreover, image processing techniques were employed to track displacements down to 1 μm. The data from the image processing analysis along with data from AD7747 was used to characterize the devices for change in capacitance and displacement with respect to applied DC voltage.