Fabrication of a Miniaturized ZnO Nanowire Accelerometer and Its Performance Tests

Sensors

Sangho Song¹  Jaehwan Kim¹  Hyun Chan Kim¹ 

[1] Creative Research Center for Nanocellulose Future Composites, Department of Mechanical Engineering, Inha University, 100 Inha-Ro, Nam-Ku, Incheon 22212, Korea;

关键词: accelerometer;    ZnO nanowire;    miniaturization;    piezoelectric;    micro fabrication;   

DOI  :  10.3390/s16091499

来源: DOAJ

【 摘 要 】

This paper reports a miniaturized piezoelectric accelerometer suitable for a small haptic actuator array. The accelerometer is made with zinc oxide (ZnO) nanowire (NW) grown on a copper wafer by a hydrothermal process. The size of the accelerometer is 1.5 × 1.5 mm2, thus fitting the 1.8 × 1.8 mm2 haptic actuator array cell. The detailed fabrication process of the miniaturized accelerometer is illustrated. Performance evaluation of the fabricated accelerometer is conducted by comparing it with a commercial piezoelectric accelerometer. The output current of the fabricated accelerometer increases linearly with the acceleration. The miniaturized ZnO NW accelerometer is feasible for acceleration measurement of small and lightweight devices.

【 授权许可】

Unknown