Quasi-Transient Calculation of Czochralski Growth of Ge Crystals Using the Software Elmer

Crystals

Jószef Janicskó-Csáthy¹  Alexander Gybin¹  Stefan Kayser¹  Wolfram Miller¹  Jörg Fischer¹  Uta Juda¹  Nikolay Abrosimov¹ 

[1] Leibniz-Institut für Kristallzüchtung (IKZ), Max-Born-Str. 2, 12489 Berlin, Germany;

关键词: global simulation;    czochralski;    germanium;   

DOI  :  10.3390/cryst10010018

来源: DOAJ

【 摘 要 】

A numerical scheme was developed to compute the thermal and stress fields of the Czochralski process in a quasi-time dependent mode. The growth velocity was computed from the geometrical changes in melt and crystal due to pulling for every stage, for which the thermal and stress fields were computed by using the open source software Elmer. The method was applied to the Czochralski growth of Ge crystals by inductive heating. From a series of growth experiments, we chose one as a reference to check the validity of the scheme with respect to this Czochralski process. A good agreement both for the shapes of the melt/crystal interface at various time steps and the change in power consumption with process time was observed.

【 授权许可】

Unknown