Vibration Energy Harvester Based on Torsionally Oscillating Magnet

Micromachines

Dayong Qiao¹  Kai Tao¹  Chenyuan Zhou²  Jiaxing Li²  Xinyi Wang²  Yunjia Li² 

[1] Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi’an 710072, China;School of Electrical Engineering, Xi’an Jiaotong University, Xi’an 710049, China;

关键词: electromagnetic;    energy harvester;    MEMS;    planar coil;   

DOI  :  10.3390/mi12121545

来源: DOAJ

【 摘 要 】

Most of the miniaturized electromagnetic vibrational energy harvesters (EVEHs) are based on oscillating proof mass suspended by several springs or a cantilever structure. Such structural feature limits the miniaturization of the device’s footprint. This paper presents an EVEH device based on a torsional vibrating magnet over a stack of flexible planar coils. The torsional movement of the magnet is enabled by microfabricated silicon torsional springs, which effectively reduce the footprint of the device. With a size of 1 cm × 1 cm × 1.08 cm, the proposed EVEH is capable of generating an open-circuit peak-to-peak voltage of 169 mV and a power of 6.9 μW, under a sinusoidal excitation of ±0.5 g (g = 9.8 m/s²) and frequency of 96 Hz. At elevated acceleration levels, the maximum peak-to-peak output voltage is 222 mV under the acceleration of 7 g (±3.5 g).

【 授权许可】

Unknown