An Electromagnetic MEMS Energy Harvester Array with Multiple Vibration Modes

Micromachines

Huicong Liu²  Tao Chen²  Lining Sun²  Chengkuo Lee¹ 

[1] Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore; E-Mail:;Jiangsu Provincial Key Labratory of Advanced Robotics, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China; E-Mails:

关键词: MEMS;    energy harvester;    electromagnetic;    multi-frequency;   

DOI  :  10.3390/mi6080984

来源: mdpi

【 摘 要 】

This paper reports the design, micromachining and characterization of an array of electromagnetic energy harvesters (EHs) with multiple frequency peaks. The authors present the combination of three multi-modal spring-mass structures so as to realize at least nine resonant peaks within a single microelectromechanical systems (MEMS) chip. It is assembled with permanent magnet to show an electromagnetic-based energy harvesting capability. This is the first demonstration of multi-frequency MEMS EH existing with more than three resonant peaks within a limited frequency range of 189 to 662 Hz. It provides a more effective approach to harvest energy from the vibration sources of multiple frequency peaks.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.