A MEMS Electrochemical Angular Accelerometer Leveraging Silicon-Based Three-Electrode Structure

Micromachines

Mingwei Chen¹  Jian Chen¹  Junbo Wang¹  Deyong Chen¹  Anxiang Zhong¹  Yulan Lu¹ 

[1] State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China;

关键词: angular accelerometer;    electrochemical principle;    MEMS;    silicon based three-electrode structure;    high performance;   

DOI  :  10.3390/mi13020186

来源: DOAJ

【 摘 要 】

This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the silicon-based three-electrode structure increased the electrode area and the sensitivity of the device. Finite element simulation was conducted for geometry optimization where the anode length, the orifice diameter, and the orifice spacing of the sensitive unit were determined as 200 μm, 80 μm, and 500 μm, respectively. Microfabrication was conducted to manufacture the silicon-based three-electrode structure, which then was assembled to form the electrochemical angular micro-accelerometer, leveraging mechanical compression. Device characterization was conducted, where the sensitivity, bandwidth, and noise level were quantified as 290.193 V/(rad/s²) at 1 Hz, 0.01–2 Hz, and 1.78 × 10⁻⁸ (rad/s²)/Hz^1/2 at 1 Hz, respectively. Due to the inclusion of the silicon-based three-electrode structure, compared with previously reported electrochemical angular accelerometers, the angular accelerometer developed in this article was featured with a higher sensitivity and a lower self-noise level. Therefore, it could be used for the measurement of low-frequency seismic rotation signals and played a role in the seismic design of building structures.

【 授权许可】

Unknown