Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor

Sensors

关键词: reference electrode;    thin-film technique;    thick-film technique;    “one chip” sensor;    pH sensor;   

DOI  :  10.3390/s30900330

来源: DOAJ

【 摘 要 】

Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The stability of the potential of the reference electrodes without KClcontaining membranes in 3 M KCl was about 7 hours for thin-film electrodes and up to 90 hours for thick-film electrodes. The reference electrodes with membrane were stable for more than two months. The thick-film reference electrode was integrated with a thin-film pH sensor onto one chip and the system pH sensor/reference electrode was investigated by means of capacitance/voltage (C/V) and constant capacitance (ConCap) mode.

【 授权许可】

Unknown