Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor

Sensors

Anette Simonis¹  Hans Lüth¹  Joseph Wang¹ 

[1] ¹University of Applied Sciences Aachen, Ginsterweg 1, 52428 Jülich, Germany ²Institute of Thin Films and Interfaces, Research Centre Jülich GmbH, 52425 Jülich, Germany ³New Mexico State University, Las Cruces, NM 88003-8001, USA

关键词: reference electrode;    thin-film technique;    thick-film technique;    “one chip” sensor;    pH sensor;   

DOI  :  10.3390/s30900330

来源: mdpi

【 摘 要 】

Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The stability of the potential of the reference electrodes without KClcontaining membranes in 3 M KCl was about 7 hours for thin-film electrodes and up to 90 hours for thick-film electrodes. The reference electrodes with membrane were stable for more than two months. The thick-film reference electrode was integrated with a thin-film pH sensor onto one chip and the system pH sensor/reference electrode was investigated by means of capacitance/voltage (C/V) and constant capacitance (ConCap) mode.

【 授权许可】

CC BY   
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.