MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer

Proceedings

Matthias Kahr¹  Wilfried Hortschitz¹  Gabor Kovacs¹  Michael Stifter¹  Harald Steiner¹  Andreas Kainz²  Franz Keplinger²  Johannes Schalko² 

[1] Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria;Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria;

关键词: gradiometer;    Lorentz force;    MOEMS;   

DOI  :  10.3390/proceedings2130724

来源: DOAJ

【 摘 要 】

The functional principle of an optical gradient magnetic field sensor consisting of two independent laterally oscillating masses on a single chip is reported. These oscillations are caused by the Lorentz forces resulting from an alternating current through the masses interacting with a static magnetic field. Light is modulated by relative in-plane movement of the masses and a fixed frame and subsequently detected by two photodiodes. Evaluation of magnitude and phase of the output signal reveals information about the uniformity of the magnetic field. The sensor is capable of detecting uniaxially strength and direction of magnetic gradient fields, offset gradient fields and homogeneous fields.

【 授权许可】

Unknown