Proceedings | |
MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer | |
Steiner, Harald1  Kahr, Matthias2  Stifter, Michael3  Hortschitz, Wilfried4  | |
[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria;Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9â12 September 2018 | |
关键词: gradiometer; Lorentz force; MOEMS; | |
DOI : 10.3390/proceedings2130724 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: mdpi | |
【 摘 要 】
The functional principle of an optical gradient magnetic field sensor consisting of two independent laterally oscillating masses on a single chip is reported. These oscillations are caused by the Lorentz forces resulting from an alternating current through the masses interacting with a static magnetic field. Light is modulated by relative in-plane movement of the masses and a fixed frame and subsequently detected by two photodiodes. Evaluation of magnitude and phase of the output signal reveals information about the uniformity of the magnetic field. The sensor is capable of detecting uniaxially strength and direction of magnetic gradient fields, offset gradient fields and homogeneous fields.
【 授权许可】
CC BY
【 预 览 】
Files | Size | Format | View |
---|---|---|---|
RO201910251218603ZK.pdf | 1635KB | download |