Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields

Proceedings

Steiner, Harald¹  Kahr, Matthias²  Stifter, Michael³  Hortschitz, Wilfried⁴ 

[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, Wiener Neustadt 2700, Austria;Institute of Sensor and Actuator Systems, TU Wien, Vienna 1040, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: MOEMS;    gradiometer;    Lorentz force;   

DOI  :  10.3390/proceedings2130843

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

This paper reports a MEMS gradiometer consisting of two independent, laterally oscillating masses on a single chip with integrated optical readout featuring a responsitivity of 35V/T at resonant operation. The symmetrical design of the two masses offers high accuracy and low cost by using conventional MEMS batch fabrication technology. The sensing principle is based on lateral displacement of the masses actuated by Lorentz forces which modulates a light flux passing through a stationary mask and the moving mask integrated in the masses. Phase and intensity detected by photodiodes reveal information about the uniformity of an external applied magnetic field, hence, enables the measurement of gradient-, homogeneous- and offset gradient magnetic fields.

【 授权许可】

CC BY