Analysis on Characteristics of ZnO Surface Acoustic Wave with and without Micro-Structures

Micromachines

Yi Lin¹  Huei-Yu Huang²  Hsi-Jen Chiang²  Yung-Kang Shen³  Ching-Zong Wu⁴ 

[1] Department of Business Administration, Takming University of Science and Technology, Taipei 114, Taiwan;Department of Dentistry, Taipei Medical University-Shuang Ho Hospital, New Taipei City 235, Taiwan;School of Dental Technology, College of Oral Medicine, Taipei Medical University, Taipei 110, Taiwan;School of Dentistry, College of Oral Medicine, Taipei Medical University, Taipei 11031, Taiwan;

关键词: surface acoustic wave;    ZnO thin film;    silicon micromachining;    signal response;   

DOI  :  10.3390/mi10070434

来源: DOAJ

【 摘 要 】

In this paper, we fabricate a surface acoustic wave (SAW) device with micro-structures on a zinc oxide (ZnO) thin film and measure its signal response. The manufacturing processes of the SAW device include the fabrication of micro-structures of a SAW element and its interdigital transducer by silicon micro-machining and the fabrication of a thin film of ZnO by RF magnetron sputtering. We, then, measure the SAW properties. This research investigates the properties of sputtered thin films for various amounts of O₂/(Ar + O₂) using Zn and ZnO targets. Regardless of target, the growth rate of the ZnO thin film decreases as the oxygen content increases. When the SAW is sputtered ZnO thin film using 30% oxygen, the digital signal of the SAW has better performance. The measurement signal of the SAW with micro-structures is similar to that without micro-structures.

【 授权许可】

Unknown