Effect of substrates on Zinc Oxide thin films fabrication using sol-gel method

6th International Conference on Electronic Devices, Systems and Applications 2017

无线电电子学;工业技术

Kadir, Rosmalini Ab^1 ; Mohd Taib, Nurmalina^1 ; Wan Ahmad, Wan Rosmaria^1 ; Aziz, Anees Abdul^1 ; Zoolfakar, Ahmad Sabirin^1

Faculty of Electrical Engineering, University Teknologi Mara, Shah Alam

40450, Malaysia^1

关键词: Characterization of the films;    Different substrates;    Dipcoating methods;    On-wafer;    P-type silicon;    UV-Vis NIR;    Zinc oxide thin films;    ZnO thin film;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/340/1/012002/pdf
DOI  :  10.1088/1757-899X/340/1/012002

学科分类：工业工程学

来源: IOP

【 摘 要 】

The properties of ZnO thin films were deposited on three different substrates via dip coating method was investigated. The films were prepared on glass, ITO and p-type silicon. Characterization of the film revealed that the properties of the dip coated ZnO thin films were influenced by the type of substrates. The grains on ITO and glass were ∼10 nm in size while the grains on wafer agglomerate together to form a denser film. Studies of the optical properties using UV-VIS-NIR of the fabricated films demonstrated that glass has the highest transmittance compared to ITO.