Growth conditions effects on the H2 and CO2 gas sensing properties of Indium Tin Oxide

International Physics Conference at the Anatolian Peak 2016

Isik, S.^1 ; Coban, O.^1 ; Shafai, C.^2 ; Tuzemen, S.^1 ; Gur, E.^1

Department of Physics, Faculty of Science, Ataturk University, Erzurum, Turkey^1

Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, Canada^2

关键词: Characterization of the films;    Figure of merit (FOM);    Indium tin oxide thin films;    Optical absorption techniques;    Resistive gas sensors;    RF magnetron sputter depositions;    Structural and morphological properties;    X-ray diffraction spectroscopy;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/707/1/012021/pdf
DOI  :  10.1088/1742-6596/707/1/012021

来源: IOP

【 摘 要 】

Indium Tin Oxide (ITO) thin films are transparent conducting wide bandgap oxide. In this study investigated optical, structural and morphological properties of sputtered ITO thin films using X-ray diffraction spectroscopy (XRD), Scanning electron microscopy (SEM), Energy Dispersive Spectroscopy (EDX) and optical absorption techniques. These measurements revealed that the oxygen gas percentage present in the ITO film deposited by RF magnetron sputter deposition showed systematic variation of its band gap, crystal orientation, growth rate, figure of merit (FOM) and dominant XRD peaks. All the thin films deposited at room temperature (RT). Once characterization of the films carried out, H2and CO2resistive gas sensors fabricated by depositing the ITO film on top of aluminium interdigitated contacts/electrode (IDE), that fabricated following lithography and etching processes. These devices showed reasonable sensitivity for pure H2and CO2at elevated temperature. A correlation found between the thin film properties of the ITO and its sensing capability for H2and CO2, which these gases are important in many fields such as automotive, energy, biological and health-related applications.