All-digital PLL System for Self-oscillation Mode of Microcantilevers with Integrated Bimorph Actuator and Piezoresistive Readout

Sensors & Transducers

Nikolay Kenarov¹  Nikolay Nikolov¹  Peycho Popov¹  Ivo Rangelow²  Theodor Gotszalk³ 

[1] Microsystems LTD, 9010 PO Box 147 Varna, Bulgaria;Technical University of Ilmenau, Institute of micro-and nanoelectronics, Gustav - Kirchhoff - Str. 1, Ilmenau, Germany;Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, ul. Wybrzez Wyspianskiego 27, Poland;

关键词: Microcantilever;    Self-oscillation;    AFM;   

DOI  :  

来源: DOAJ

【 摘 要 】

Self-oscillation system for microcantilevers with integrated actuator and piezoresistive read-out has been newly developed. The presented concept uses Phase Locked Loop approach which forces the system to lock at resonance frequency of the microcantilever sensors and to follow its changes. The system has been implemented in FPGA and tested with microcantilever sensors. The feedback response and signal spectrum have been investigated.

【 授权许可】

Unknown