期刊论文详细信息
Nanomaterials | |
Heavily Boron-Doped Silicon Layer for the Fabrication of Nanoscale Thermoelectric Devices | |
Zhe Ma1  Qing Liu1  An Ji1  Lingxiao Deng1  Mingliang Zhang1  Fuhua Yang1  Shuyuan Zhang1  Jing Ma1  Yang Liu1  Peishuai Song1  Xiaodong Wang1  | |
[1]Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China | |
关键词: heavily boron-doped silicon layer; boron etch-stop; thermoelectric; silicon nanowire; ZT; nanostructures; | |
DOI : 10.3390/nano8020077 | |
来源: DOAJ |
【 摘 要 】
Heavily boron-doped silicon layers and boron etch-stop techniques have been widely used in the fabrication of microelectromechanical systems (MEMS). This paper provides an introduction to the fabrication process of nanoscale silicon thermoelectric devices. Low-dimensional structures such as silicon nanowire (SiNW) have been considered as a promising alternative for thermoelectric applications in order to achieve a higher thermoelectric figure of merit (ZT) than bulk silicon. Here, heavily boron-doped silicon layers and boron etch-stop processes for the fabrication of suspended SiNWs will be discussed in detail, including boron diffusion, electron beam lithography, inductively coupled plasma (ICP) etching and tetramethylammonium hydroxide (TMAH) etch-stop processes. A 7 μm long nanowire structure with a height of 280 nm and a width of 55 nm was achieved, indicating that the proposed technique is useful for nanoscale fabrication. Furthermore, a SiNW thermoelectric device has also been demonstrated, and its performance shows an obvious reduction in thermal conductivity.【 授权许可】
Unknown