Silicon Nanowire-Based Devices for Gas-Phase Sensing

Sensors

Anping Cao¹  Ernst J.R. Sudhölter¹ 

[1] Department of Chemical Engineering, Delft University of Technology, Julianalaan 136, Delft 2628 BL, The Netherlands;

关键词: silicon nanowire;    field effect transistor;    resistor;    gas;    vapor;    volatile organic compound;   

DOI  :  10.3390/s140100245

来源: mdpi

【 摘 要 】

Since their introduction in 2001, SiNW-based sensor devices have attracted considerable interest as a general platform for ultra-sensitive, electrical detection of biological and chemical species. Most studies focus on detecting, sensing and monitoring analytes in aqueous solution, but the number of studies on sensing gases and vapors using SiNW-based devices is increasing. This review gives an overview of selected research papers related to the application of electrical SiNW-based devices in the gas phase that have been reported over the past 10 years. Special attention is given to surface modification strategies and the sensing principles involved. In addition, future steps and technological challenges in this field are addressed.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.