A Ceramic Diffusion Bonding Method for Passive LC High-Temperature Pressure Sensor

Sensors

Boshan Sun¹  Yanan Xue¹  Chen Li¹  Jijun Xiong¹ 

[1] Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;

关键词: alumina ceramic;    diffusion bonding;    sensitive cavity;    pressure sensor;    high-temperature application;   

DOI  :  10.3390/s18082676

来源: DOAJ

【 摘 要 】

Alumina ceramic is a highly promising material for fabricating high-temperature pressure sensors. In this paper, a direct bonding method for fabricating a sensitive cavity with alumina ceramic is presented. Alumina ceramic substrates were bonded together to form a sensitive cavity for high-temperature pressure environments. The device can sense pressure parameters at high temperatures. To verify the sensitivity performance of the fabrication method in high-temperature environments, an inductor and capacitor were integrated on the ceramic substrate with the fabricated sensitive cavity to form a wireless passive LC pressure sensor with thick-film integrated technology. Finally, the fabricated sensor was tested using a system test platform. The experimental results show that the sensor can realize pressure measurements above 900 °C, confirming that the fabricated sensitive cavity has excellent sealing properties. Therefore, the direct bonding method can potentially be used for developing all-ceramic high-temperature pressure sensors for application in harsh environments.

【 授权许可】

Unknown