Sensors | |
A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for |
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Qiulin Tan1  Chen Li1  Jijun Xiong1  Pinggang Jia1  Wendong Zhang1  Jun Liu1  Chenyang Xue1  Yingping Hong1  Zhong Ren1  | |
[1] Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China; E-Mails: | |
关键词:
high-temperature pressure sensor;
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DOI : 10.3390/s140202417 | |
来源: mdpi | |
【 摘 要 】
In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.
【 授权许可】
CC BY
© 2014 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190029289ZK.pdf | 1936KB | download |