Heat Treatment of Nanocrystalline ZnO and AZO Films Grown by Pulsed Laser Deposition

Sensors & Transducers

Dharmendra MISHRA¹  K. C. DUBEY²  Anchal SRIVASTAVA²  R. K. SHUKLA² 

[1] Amity School of Engineering & Technology, Amity University, Lucknow-226010, India;Department of Physics, University of Lucknow, Lucknow-226007, India;

关键词: Heat treatment;    Undoped and doped ZnO;    Transparent conducting oxide;    Pulsed laser deposition;   

DOI  :  

来源: DOAJ

【 摘 要 】

Repeated heating and cooling of the pulsed laser as-deposited ZnO and Aluminium doped ZnO (AZO) films at temperatures below the deposition temperature modifies their structural, optical and electrical properties while maintaining the c-axis orientation. Heat treatment affects the AZO films only slightly and the minimum electrical resistivity occurs for 2at% Al doped film. The electrical resistivity of undoped ZnO film decreases by a factor of more than half after heating. Unlike as-deposited films the lattice constant decreases linearly with increased Al doping and the maximum grain size is observed at 2at% Al doping. Absorption edges of the heat treated films show a small red shift in comparison as-deposited films. Interestingly, for heat treated films minimum resistivity and the largest grain size both occur at 2at%Al doping in ZnO.

【 授权许可】

Unknown